silane

A pungent flammable gas, SiH₄, that is toxic and irritating, used in the manufacture of semiconductors.

Any of a group of silicon hydrides having the general formula Si_nH_2n+2 that are analogous to the alkanes.

Any of a group of silicon hydrides that are analogous to alkanes (the paraffin hydrocarbons); especially the parent compound SiH4

monosilane (SiH₄)